VERTICAL HEAT TREATMENT EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a vertical heat treatment equipment wherein improvement of maintainability and reduction of maintenance area are enabled. SOLUTION: The vertical heat treatment equipment is provided with a treatment tube (reaction tube) 18 for heat treatment into which a boat 8 which retains a plurality of substrates to multiple step is inserted, a heating unit (thermal treatment furnace) 9 which surrounds the treatment tube 18 and heats the substrates in the treatment tube, an exhaust port 14 which exhausts atmosphere between the inside of the heating unit 9 and the outside of the treatment tube 18 and is arranged in the heating unit 9, and a cooling means 16 for cooling discharge object in a conduit connected with the exhaust port 14. The heating unit 9 can be slid horizontally to a back side of a cabinet 1. The cooling means 16 is arranged to a front surface side of the heating unit 9. COPYRIGHT: (C)2004,JPO