| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for an organic EL display device capable of preventing rise of contact resistance between an extraction electrode and a metal electrode, in an organic EL display device manufactured by preventing formation of a reformed layer to a surface of the extraction electrode in a heating process such as baking of an interlayer insulation layer when the organic EL display is manufactured. SOLUTION: This substrate used for the organic electroluminescent (EL) display device is formed by stacking, on a glass transparent substrate, a transparent electrode film formed of ITO, and a metallic extraction electrode film in that order. On the surface of the extraction electrode film, a barrier layer containing a nitride of a metal material of the extraction electrode is formed. The nitrogen atom concentration and the oxygen atom concentration of the barrier layer are above 10% and 0-10%, respectively. COPYRIGHT: (C)2004,JPO
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