| 摘要 |
PROBLEM TO BE SOLVED: To suppress elastic vibration of a movable body and realize a highly precise position control system. SOLUTION: This controller for elastic vibration has a driving means for controlling the movable body and a rigid body position of the movable body and an elastic vibration measuring means for measuring elastic vibration of the movable body. The driving means suppresses elastic vibration using a measured value of the elastic vibration measuring means. COPYRIGHT: (C)2004,JPO |
