| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To form an extremely minute dot pattern with high throughput, at a low cost and with excellent reproducibility in a method for forming a dot pattern. <P>SOLUTION: A plurality of minute probe 1 having a heating mechanism mounted on a probe head are contacted to a substrate 2 on which a thermal deformation material 3 is formed as a film, the probe 1 is heated, recessed patterns 4 losing the thermal deformation material 3 are integrally formed on the substrate 2, then, after embedding a dot forming material 5 in the formed recessed patterns 4, the thermal deformation material 3 is removed. <P>COPYRIGHT: (C)2004,JPO</p> |
