ALIGNMENT MARK STRUCTURE WITH SEARCH KEY FOR REGION-IDENTIFICATION

摘要

PURPOSE: An alignment mark structure is provided to find easily an exact position of a search key in a manual search by using an identification mark of the search key. CONSTITUTION: An alignment mark structure is used for alignment in an exposure process. The alignment mark structure is divided into the first and second region(A,B). The first search key(21) is at the boundary of the first region. The second search key(22) is at the boundary of the second region. The Roman alphabet for discriminating between the regions is formed on each search key. The Roman alphabet is used as an identification mark.