| 摘要 |
PURPOSE: A sealing member is expanded when positioned to an air passage to easily assemble and move the sealing member and to minimize scratch by long use. CONSTITUTION: A housing(100) is formed with a slide space passing an air passage connecting a process chamber and a vacuum chamber. A sealing member is inserted to the slide space to open/close the air passage. An actuator is provided in one side of the housing to move back and forth a driving shaft. A link member is installed to transfer driving force of the driving shaft to the sealing member to open/close the air passage by the sealing member.
|
