发明名称 SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A semiconductor device and a fabricating method thereof are provided to obtain the extended effective channel length by using a buried type gate electrode. CONSTITUTION: A projected gate electrode(180) is buried into a semiconductor substrate(100). A gate oxide layer(170) is formed on a boundary between the semiconductor substrate and the gate electrode. A channel region(150,160) is formed on the semiconductor substrate adjacent to a lower side of the gate electrode. An insulating layer spacer(190) is formed on a sidewall of the projected gate electrode. A low-density doping region(110) is formed on the semiconductor substrate of both sides of the projected gate electrode. A high-density doping region(200) is formed on both sides of the low-density doping region.
申请公布号 KR20040058796(A) 申请公布日期 2004.07.05
申请号 KR20020085187 申请日期 2002.12.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SUN, U GYEONG
分类号 H01L21/336;(IPC1-7):H01L21/336 主分类号 H01L21/336
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