| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of efficiently manufacturing high purity tetrafluoro silane. SOLUTION: In the manufacture of tetrafluoro silane by the thermal decomposition reaction of hexafluoro silicate, after a process (1-1) of bringing the hexafluoro silicate into contact with hydrogen fluoride and/or fluorine, a process (2) of producing tetrafluoro silane by the thermal decomposition reaction of the hexafluoro silicate is performed. COPYRIGHT: (C)2004,JPO&NCIPI |
