| 摘要 |
PURPOSE: A field emission device and a manufacturing method thereof are provided to prevent influences of a dielectric breakdown element on the adjacent normal element upon occurrence of short caused due to a dielectric breakdown. CONSTITUTION: A field emission device comprises a lower electrode(24) formed on a substrate; an anode oxide film(25) formed on a certain part of the lower electrode; a tunnel oxide film(26) formed on a certain part of the lower electrode; a dual insulation film(27) formed on the resultant structure, and which has an aperture formed on the tunnel oxide film; an upper data electrode(28) formed on the dual insulation film, and which has a protruded portion exposed in the aperture; and a top electrode formed on the resultant structure and connected to the exposed portion of the upper data electrode.
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