| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL display manufacturing device capable of stably controlling the film thickness with excellent responsiveness when an organic layer is deposited by vacuum vapor deposition. SOLUTION: In a state in which a material is scattered from a vapor deposition source 113 to a base material 2 carried by a base material carrying means 111, the vapor deposition velocity is detected based on the film thickness obtained from a film thickness monitor 114, the film thickness vapor-deposited on a substrate is estimated, and a control means 131 controls the material scattering range by controlling the position of a control means 117. Since the material scattering range in the carrying direction of a base material scattered from the vapor deposition source 113 is proportional to the film thickness of the material vapor-deposited on the base material, the quantity of the material to be vapor-deposited on the base material, and the thickness of the film to be deposited can be controlled thereby. COPYRIGHT: (C)2004,JPO&NCIPI
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