| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device capable of solving the deterioration of the balance of a polyphase power supply such as a 3-phase AC power supply or the like, and heating so that the electric power of the respective phases of the polyphase power may be the same value. SOLUTION: Heaters 401, 402, and 403 of zones 1, 2, and 3 are equally divided respectively into loads A, B, and C, thereby forming a heater 401A (zone 1 load A), a heater 401B (zone 1 load B), a heater 401C (zone 1 load C), a heater 402A (zone 2 load A), a heater 402B (zone 2 load B), a heater 402C (zone 2 load C), a heater 403A (zone 3 load A), a heater 403B (zone 3 load B), a heater 403C (zone 3 load C). The heaters 401, 402, and 403 of the respective zones 1, 2, and 3 control by the same control command value in each zone respectively. The power of the respective phases L1, L2, and L3 of a 3-phase power is supplied to the loads A, B, and C equally divided into the respective zones 1, 2, and 3. COPYRIGHT: (C)2004,JPO&NCIPI
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