METHOD OF CORRECTING MEASUREMENT ERROR BY CALCULATING STANDARD TEST JIG MEASUREMENT VALUE OF OBJECTIVE ELECTRONIC COMPONENT AT STATE WHERE OBJECTIVE ELECTRONIC COMPONENT IS MOUNTED ON STANDARD TEST JIG, AND ELECTRONIC COMPONENT CHARACTERISTIC MEASUREMENT APPARATUS

摘要

PURPOSE: A method and an electronic component characteristic measurement apparatus are provided to match the jig measurement value measured by a measurement jig to a standard test jig measurement value in a high accuracy. CONSTITUTION: A method comprises a step of preparing at least three correction data acquisition specimens having different electrical characteristics and an extremely small transmission coefficient between ports of specimens; a step of acquiring a standard test jig measurement value of the correction data acquisition specimens by measuring electrical characteristics of the correction data acquisition specimens by using a measurement device or another measurement device, at the state where the specimens are mounted in a standard test jig; a step of acquiring jig measurement values of the correction data acquisition specimens by measuring electrical characteristics of the correction data acquisition specimens by using a measurement device and another measurement device, at the state where the specimens are mounted in a measurement jig; a step of arranging a relative correction adapter for changing electrical characteristics generated from the measurement jig into electrical characteristics generated from a standard test jig, and identifying an error factor of the relative correction adapter from the standard test jig measurement value and jig measurement values of the correction data acquisition specimens; a step of acquiring a jig measurement value of an objective electronic component by measuring the objective electronic component by using the measurement device or another measurement device; and a step of calculating a standard test jig measurement value of the objective electronic component at state where the objective electronic component is mounted on a standard test jig.