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发明名称
磺酸酯、聚合物、光阻组成物及形成图案之方法
摘要
本发明系关于式(1)之新颖磺酸酯化合物，其中R^1至R^3是H、F或C1-20烷基或氟烷基，至少其中一个R^1至^R3含F，使用一种衍生自磺酸酯聚合物的单元组成之聚合物作为基质树脂调制光阻组成物，其对高能量放射线具有敏性，在高至200毫微米之波长维持高透明度，且具有改良的硷溶解度及电浆蚀刻耐受度。093102951-p01.bmp
申请公布号
TW200421033
申请公布日期
2004.10.16
申请号
TW093102951
申请日期
2004.02.09
申请人
信越化学工业股份有限公司;松下电器产业股份有限公司;中央硝子股份有限公司
发明人
原田裕次;山润;河合义夫;子胜;远藤政孝;岸村真治;前田一彦;小森谷治彦;宫泽觉
分类号
G03F7/039
主分类号
G03F7/039
代理机构
代理人
林志刚
主权项
地址
日本
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