| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide sintered compact which consists of niobium oxide, has high density, can allow DC to be discharged therefrom and is obtained inexpensively, and to provide a production method of the oxide sintered compact, in which the oxide sintered compact can be obtained easily by using an inexpensive facility without adopting an HP method or an HIP method.SOLUTION: The oxide sintered compact is characterized in that the density thereof is 95% or higher, the bulk resistance thereof is 1,000 Ω-cm or lower, the area of whose target surface is 500 cmor larger and the niobium (IV) oxide belonging to a NbOphase does not exist when measured by an X-ray diffraction method.SELECTED DRAWING: None |
