发明名称 Method of producing an integrated circuit with a carbon nanotube
摘要 A method of producing an integrated circuit with a carbon nanotube is disclosed. The integrated circuit includes a source, a drain, and a gate, and the source and the drain are positioned on the gate. A catalytic material is deposited onto the source. The catalytic material is then subjected to chemical vapor deposition. This initiates growth of the carbon nanotube such that the carbon nanotube extends from the source. Next, the carbon nanotube is bent toward the integrated circuit such that the carbon nanotube extends between the source and the drain to render the circuit operable.
申请公布号 US6835613(B2) 申请公布日期 2004.12.28
申请号 US20020313886 申请日期 2002.12.06
申请人 UNIVERSITY OF SOUTH FLORIDA 发明人 SCHLAF RUDIGER
分类号 C01B31/02;C23C16/04;C23C16/26;C30B25/00;G01N27/00;G01Q60/24;G01Q70/12;G11C13/02;H01L51/30;(IPC1-7):H01L21/823 主分类号 C01B31/02
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