发明名称 METHOD FOR PREPARING LOW COST SUBSTRATES
摘要 A mask is formed over a first conductive portion of a conductive layer to expose a second conductive portion of the conductive layer. An electrolytic process is performed to remove conductive material from a first region and a second region of the second conductive portion. The second region is aligned with the mask relative to an electric field applied by the electrolytic process. The second region separates the first region of the second conductive portion from the first conductive portion. The electrolytic process is concentrated relative to the second region such that removal occurs at a relatively higher rate in the second region than in the first region.
申请公布号 US2016329301(A1) 申请公布日期 2016.11.10
申请号 US201615164179 申请日期 2016.05.25
申请人 Invensas Corporation 发明人 Uzoh Cyprian Emeka;Sitaram Arkalgud R.
分类号 H01L25/065;H01L23/498;C25F3/14;H01L21/48;H01L23/00;C25F3/12;H01L23/367;H01L23/373 主分类号 H01L25/065
代理机构 代理人
主权项 1. An interposer, comprising: an interconnect structure having a first surface and a second surface opposite the first surface, including: at least two electrically conductive vias extending from the first surface to the second surface;a thermally conductive layer extending between adjacent ones of the at least two electrically conductive vias;an electrically insulative layer separating thermally conductive material of the thermally conductive layer from the at least two electrically conductive vias.
地址 San Jose CA US