| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a precise, reliable, and compact induction type position detector. SOLUTION: A reception coil 13 that is a three-dimensional (vertically wound) coil is manufactured by an MEMS (micro electro mechanical systems) process. More specifically, a through hole is formed on an arrangement substrate 7 made of silicon by lithography and etching, and a buried conductive section 37 is formed on the through hole. A surface conductive section 39 is formed on a front face 31 of the arrangement substrate 7 by plating, and a rear conductive section 41 is formed on a back face 33 of the arrangement substrate 7 by plating. COPYRIGHT: (C)2005,JPO&NCIPI
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