| 摘要 |
PROBLEM TO BE SOLVED: To provide a protrusion height measuring method and a measuring apparatus capable of measuring the height of a plurality of protrusion at high speeds. SOLUTION: A work 100 is mounted to a movable stage 321, and protrusions on the work 100 are imaged by an imaging camera 310. By moving the imaging camera 310 in an X-axis direction and moving the movable stage 321 in a Y-axis direction, all the surfaces of the work 100 are scanned. An area sensor having a visual field region E is built in the imaging camera 310, and the visual field region E is illuminated by an illumination part 330. The area sensor images an image of the visual field region E from a direction at a prescribed angel of elevationθ. The imaged image is captured in a control processing device 340 to perform the processing of extracting contour lines of an image corresponding to the protrusions. Assuming that the protrusions are conical, the maximum width of the image corresponding to the protrusions in a lateral direction is recognized as the length D of a part corresponding to a diameter, and its maximum width in a vertical direction is recognized as the length L of a part corresponding to a generatrix line. By operation based on the angle of elevationθand the lengths D and L, the height h of the protrusions is determined. COPYRIGHT: (C)2005,JPO&NCIPI
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