发明名称 |
Krystalvækstobservationsapparat |
摘要 |
A STM drive mechanism (3) capable of moving a scanning tunnelling microscope (STM) (2) incorporated with a molecular beam epitaxy (MBE) device (1) in the MBE device under vacuum and a substrate holder (11) with a wide clearance formed between a substrate heating system (14) and the substrate holder are provided, and the STM is protected by a heat insulating shield (21) from high vapour pressure atmosphere and radiant heat according to substrate heating. <IMAGE> |
申请公布号 |
DK0936291(T3) |
申请公布日期 |
2005.04.25 |
申请号 |
DK19980310092T |
申请日期 |
1998.12.09 |
申请人 |
NATIONAL RESEARCH INSTITUTE FOR METALS |
发明人 |
TSUKAMOTO, SHIRO;KOGUCHI, NOBOYUKI |
分类号 |
G01N37/00;B05C11/00;C30B23/02;C30B23/08;G01N27/00;G01Q30/18;G01Q30/20;G01Q60/10;H01L21/203;(IPC1-7):C30B23/02 |
主分类号 |
G01N37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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