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发明名称
摘要
申请公布号
JP3644138(B2)
申请公布日期
2005.04.27
申请号
JP19960192358
申请日期
1996.07.22
申请人
发明人
分类号
H01L21/82;G06F17/50;H01L21/822;H01L27/04;(IPC1-7):H01L21/82
主分类号
H01L21/82
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