DROPLET DISCHARGING DEVICE, AND APPARATUS AND METHOD FOR MANUFACTURING MICROARRAY

摘要

PROBLEM TO BE SOLVED: To provide a compact droplet discharging apparatus for manufacturing a high-density array. SOLUTION: The droplet discharging apparatus 100 comprises a first substrate having a plurality of accommodation chambers 111 for accommodating liquid; a second substrate having a plurality of discharge units including a supply port 121 for receiving the supply of liquid stored in the accommodation chamber 111, a pressure chamber for giving pressure to liquid supplied from the supply port 121, and a discharge port for discharging liquid pressurized by the pressure chamber to the outside; and a third substrate that is sandwiched between the first and second substrates and has a channel for connecting the plurality of accommodation chambers 111 and the plurality of supply ports 121 corresponding to them. A plurality of supply port arrays provided on the second substrate are in a position relationship of a zigzag arrangement. COPYRIGHT: (C)2005,JPO&NCIPI