| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a coil for a monolithic integrated circuit by which a conductive carbon nano coil can be so grown as to connect electrodes on a semiconductor substrate, and to provide a monolithic integrated circuit which is such that the inter-electrode carbon nano coil manufactured by the above method, transistors, and other components are integrally formed on one and the same semiconductor substrate. SOLUTION: A catalyst is deposited at electrodes (12a) and (12b) on both sides of a coil on the semiconductor substrate (11). Then, the semiconductor substrate (11) is sent into a reaction tube (10) of vapor phase epitaxy equipment, and a reaction material is sent into the reaction tube (10), wherein the reaction material is carried on a carrier gas. By causing the reaction material to react with the catalyst deposited at the electrodes (12a) and (12b) on both sides of the coil which is now located in a heat-up section, the carbon nano coil (13) is grown to connect the electrodes (12a) and (12b) on both sides of the coil. COPYRIGHT: (C)2005,JPO&NCIPI |
