| 摘要 |
PROBLEM TO BE SOLVED: To provide a purge valve and a stocker that can decrease a loss of a clean gas at the utmost that is sent to each storage chamber for keeping the cleanness of a stocker's respective chambers and decrease storage costs as well for semiconductor wafers and the like, and can also prevent a nitrogen gas leaking or flowing into a clean room. SOLUTION: More than one independent storage chamber 15 is incorporated and housed in the stocker 14. In each of the storage chambers 15, a purge valve 1 is disposed at its bottom, and a support stand 17 is directly connected to an actuator right above the purge valve 1 so that vertical motion of the support stand 17 may, in turn, become that of the actuator. The support stand 17 is held by a spring 24. COPYRIGHT: (C)2005,JPO&NCIPI |
