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发明名称
摘要
申请公布号
JP3665453(B2)
申请公布日期
2005.06.29
申请号
JP19970281329
申请日期
1997.09.29
申请人
发明人
分类号
H01L29/74;H01L29/744;(IPC1-7):H01L29/74
主分类号
H01L29/74
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