| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer ceramic substrate which has less lateral burning shrinkage and has a high dimensional accuracy, and to provide a method of manufacturing the multilayer ceramic substrate which can surely suppress the burning shrinkage. SOLUTION: The multilayer ceramic substrate K comprises a substrate body H made by stacking a plurality of ceramic insulation layers z1-z3, and electrodes 2 and 8 which are formed on the front face 1 and the rear face 10 of the substrate body H, with bottoms (2b and 8b) cutting into the ceramic insulation layers z1 and z3 which constitutes the front face 1 and the rear face 10 respectively by a depth d of 2μm or above. A distance between the tops (2a and 8a) of the electrodes 2 and 8 and the front face 1 of the substrate body H or the rear face 10 is 19μm or less. COPYRIGHT: (C)2005,JPO&NCIPI |
