| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional confined quantum nano-structure and its manufacturing method which develops a superior characteristic at room temperature without being damaged by working. SOLUTION: Metal particulates 12 are formed on a substrate 11, a columnar structure 13 having an active layer 13b and light confining layers 13a, 13c is grown in a vapor phase-liquid phase-solid phase (VLS) growth between the substrate 11 and the particulates 12 with the particulates 12 used as active points, and a layer having a different composition from the active layer 13b of the columnar structure 13 is buried and grown to form a buried structure 14 on the substrate 11 so as to surround the columnar structure 13, thus manufacturing a three-dimensional confined quantum nano-structure 10. COPYRIGHT: (C)2005,JPO&NCIPI |
