发明名称 |
Semiconductor alignment aid |
摘要 |
An alignment aid for semiconductor devices. The alignment aid includes an area having a high level of reflectivity and an adjacent area having a of low level of reflectivity. The area having a low level of reflectivity includes at least one layer of tiles located in an interconnect layer of a semiconductor device and located over active circuitry of the semiconductor device. In some examples, the spacings between the tiles in a scan direction of the alignment aid is less than the wavelength of a light (e.g. a laser light) used to scan the alignment aid. In other examples, the width of the tiles in a scan direction of the alignment aid is less than the wave length of a laser used to scan the alignment aid.
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申请公布号 |
US6933523(B2) |
申请公布日期 |
2005.08.23 |
申请号 |
US20030402539 |
申请日期 |
2003.03.28 |
申请人 |
FREESCALE SEMICONDUCTOR, INC. |
发明人 |
SHECK STEPHEN G. |
分类号 |
H01L;H01L21/302;H01L21/82;H01L21/8234;H01L23/29;H01L23/544;H01L23/58;H01L29/80;H01L31/0328;(IPC1-7):H01L23/58;H01L21/823 |
主分类号 |
H01L |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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