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发明名称
摘要
申请公布号
JP3690326(B2)
申请公布日期
2005.08.31
申请号
JP20010315955
申请日期
2001.10.12
申请人
发明人
分类号
C30B29/38;C30B25/02;H01L21/20;H01L21/205;H01L29/201;H01S5/323;H01S5/343;(IPC1-7):H01L21/205
主分类号
C30B29/38
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代理人
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地址
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