| 摘要 |
PROBLEM TO BE SOLVED: To enable position measuring of a stage to a base with high precision while attaining miniaturization of equipment, regarding the stage equipment which can be moved in an X-Y detection and a rotational direction with high precision by using a flat surface motor. SOLUTION: A scale unit 233 equipped with a scale portion is formed the whole surface of the base 231. Three 2-dimensional angle sensors 14A-14C are arranged on a bottom portion of a drive stage portion 237. A surface encoder 249 is constituted of the scale unit 233 and the 2-dimensional angle sensors 14A-14C, and position measuring of the drive stage 237 is performed with the surface encoder 249. COPYRIGHT: (C)2005,JPO&NCIPI |
