LASER PROCESSING PROTECTION SHEET AND PRODUCTION METHOD FOR LASER-PROCESSED ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a production method for a laser-processed article using a laser processing protection sheet capable of effectively suppressing contamination on a surface of an article to be processed by decomposition products when the article to be processed is processed by UV absorption ablation of a laser beam and capable of enhancing processing accuracy and to provide a laser processing protection sheet used for the production method for the laser-processed article.

SOLUTION: The production method for the laser-processed article includes a step of using the laser processing protection sheet having at least an adhesive layer on a base material and having a ratio of light absorption coefficient of≥1 and bonding the adhesive layer of the laser processing protection sheet to a laser beam incident surface side of the article to be processed, a step of processing the laser processing protection sheet and the article to be processed by irradiating the same with the laser beam, and a step of peeling the laser processing protection sheet from the article to be processed after the processing.

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