| 摘要 |
A detecting device includes a sensor support body having a pair of arms, and an optical sensor having a combination of a light emitting unit and a light receiving unit disposed on one and the other of the arms, respectively. A control operation section controls a driving section and, with the arms inserted in a cassette, the sensor support body is moved, thereby performing a scanning operation for scanning the substrate by the optical sensor. The scanning operation is set such that a light beam is related to the substrate while vertically moving at a plurality of scanning positions. The control operation section finds out the presence of absence of the substrate and the position of the front end of the substrate within the cassette on the basis of data obtained from the optical sensor during scanning.
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