| 摘要 |
PROBLEM TO BE SOLVED: To provide a material determining apparatus capable of determining a material precisely at a high speed. SOLUTION: The material determining apparatus 10 is constituted so as to irradiate an object 13 to be analyzed with a beam of light L to spectrally analyze the reflected beam of light L1 from the object 13 to be analyzed to determine the material of the object 13 to be analyzed and equipped with a light source 11 for emitting the beam of light L, a first light guide member 12a introducing the sample beam of light L1 reflected from the object 13 to be analyzed, which is irradiated with the light L emitted from the light source 11, from one end side to guide the same, a second light guide member 12b directly introducing the light L emitted from the light source 11 as reference light L2 from one end side to guide the same, the programmable diffraction lattice 22 connected to the other end sides of the respective light guide members 12a and 12b and respectively sweeping and modulating the sample beam of light L1 and the reference beam of light L2 at every predetermined wavelength band and a multichannel spectroscope 20 having an array detection element 25 for detecting the difference between the spectra of respective beam of light L1 and L2 at every predetermined wavelength band. COPYRIGHT: (C)2006,JPO&NCIPI
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