发明名称 OPTICAL HEATING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an optical heating apparatus which prevents a flash lamp from being broken by preventing light permeability of a light transparent window from being reduced by eliminating foreign materials from sparking from the surface of a structure member or a fixed member by radiating flash light. SOLUTION: In an optical heating apparatus comprised of a treatment chamber and a lamp house comprising a flash lamp, the structure member of the treatment chamber and the lamp house exposed under light radiated from the flash lamp is aluminum, and nickel plating is applied to a fixed member. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005332916(A) 申请公布日期 2005.12.02
申请号 JP20040148861 申请日期 2004.05.19
申请人 USHIO INC 发明人 USUKU JIYUNJI
分类号 H01L21/26;(IPC1-7):H01L21/26 主分类号 H01L21/26
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