发明名称 |
ИНТЕГРАЛЬНЫЙ ПРЕОБРАЗОВАТЕЛЬ ДАВЛЕНИЯ |
摘要 |
FIELD: measurement technology. ^ SUBSTANCE: proposed pressure transducer characterized in reduced temperature drift and output signal hysteresis of bridge circuit has n silicon chip with flat working surface and thin membrane in chip center on its underside; formed on working surface of chip are p-type radial and tangential resistance strain gages interconnected by means of electric metal wires to form bridge circuit. Strain gages are connected to interconnected metal wires through heavily doped p+ intermediate regions specially formed beyond membrane and beyond its transfer regions. Heavily doped p+ intermediate regions enclose part of membrane, transfer region, and part of silicon base. Intermediate p+ regions are similar in size and shape. ^ EFFECT: reduced error, enhanced precision and reliability of pressure transducer. ^ 1 cl, 1 dwg |
申请公布号 |
RU2004119968(A) |
申请公布日期 |
2005.12.10 |
申请号 |
RU20040119968 |
申请日期 |
2004.07.01 |
申请人 |
Госудаственное Учреждение Научно-Производственный Комплекс "Технологический центр" Московского Государственного Института Электронной Техники (ГУ НПК "ТЦ" МИЭТ) (RU) |
发明人 |
Зимин Виктор Николаевич (RU);Резнев Алексей Алексеевич (RU);Сауров Александр Николаевич (RU);Шелепин Николай Алексеевич (RU) |
分类号 |
H01L29/84 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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