发明名称 Optical spectroscopy device, process of making the same, and method of using the same
摘要 An optical spectroscopy device includes a first cladding layer is positioned over a photodetector. An optical core region is over the first cladding layer where the optical core region is configured to receive a light beam. The optical core region includes a first grating having a first pitch where the first pitch is positioned to direct a first wavelength of the light beam to a first portion of the photodetector. The optical core region further includes a second grating having a second pitch where the second grating is positioned to direct a second wavelength of the light beam to a second portion of the photodetector. The first pitch is different from the second pitch, the first wavelength is different from the second wavelength, and the first portion of the photodetector is different from the second portion of the photodetector. Additionally, a second cladding layer is over the optical core region.
申请公布号 US9459144(B2) 申请公布日期 2016.10.04
申请号 US201614987078 申请日期 2016.01.04
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Lai Jui Hsieh;Kuo Ying-Hao
分类号 G01J3/00;G01J3/02;G01J3/18;G01J3/28;H01L31/18;H01L31/0232;G02B6/42;H01L27/146 主分类号 G01J3/00
代理机构 Slater Matsil, LLP 代理人 Slater Matsil, LLP
主权项 1. A device comprising: a first cladding layer over a photodetector; an optical core region over the first cladding layer, the optical core region comprising: a first grating having a first pitch, the first grating being proximate a first portion of the photodetector; anda second grating having a second pitch, the second grating being proximate a second portion of the photodetector, the first pitch being different from the second pitch, the first portion of the photodetector being different from the second portion of the photodetector; and a second cladding layer over the optical core region.
地址 Hsin-Chu TW