Single crystal piezo (SCP) apparatus and method of forming same

摘要

A single crystal piezo (SCP) apparatus and method of forming same. The apparatus is ideally suited for actuator and energy harvesting applications. The apparatus includes an SCP layer bonded to a surface of a flexible metal layer while the metal layer is held flattened within a press or other tool. Once the bonding process is complete, the metal layer imparts a compressive strain to the SCP layer bonded thereto. A layer of uniaxial graphite may also be bonded to the SCP layer to eliminate the poison's ratio tension that would otherwise be created in the SCP layer.