CUSHIONING SHEET FOR PRESS TRANSFER, MOLD FOR PRESS TRANSFER WITH CUSHIONING SHEET, AND PRESS TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To perform high-speed transfer while improving transfer accuracy over a large area in a nano-printing method. SOLUTION: In a press transfer method, a mold with an uneven pattern formed is pushed to a substrate for transfer by using a presser to press-transfer the uneven pattern to the substrate. A cushioning sheet having a wrapping body to be an outline, a heating element set in the wrapping body, and fluid packed in the wrapping body to enclose the heating element is placed between the press surface of the presser and the mold or between the press surface and the substrate. COPYRIGHT: (C)2006,JPO&NCIPI