| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam drawing method for improving the quality of electron beam drawing. SOLUTION: The position of a starting point of electron beams parallel to each other is swung in a predetermined scanning direction, so that, for example, when an irregular distance is produced in a fifth count, the position where an irregular distance is caused is unevenly shifted in the predetermined scanning direction and this improves the quality of electron beam drawing. COPYRIGHT: (C)2006,JPO&NCIPI
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