| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for inspecting a TMR element which are capable of validating the reliability of the TMR element easily, surely and accurately in a short time with a comparatively low applied voltage which scarcely causes damage to the TMR element. SOLUTION: Each time stress voltages different from each other in polarity are applied to the TMR element, resistance values of the TMR element are measured, respectively. A resistance change volume is obtained from the measured resistance values so as to evaluate the TMR element. COPYRIGHT: (C)2006,JPO&NCIPI
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