| 摘要 |
PROBLEM TO BE SOLVED: To prevent insertion miss of a wafer by identifying a pair of opposing grooves for inserting the wafer easily. SOLUTION: In the carrier for wafer provided, at a predetermined pitch, with a plurality of opposing grooves (3) for guiding the edge of a wafer (W) in parallel in the opposing surfaces of a pair of opposing sidewall members (1, 2), each opposing groove (3) is formed by a first protrusion (5) and a second protrusion (6) arranged alternately on the inner surface of the pair of sidewall members (1, 2) and having different taper angles (α,β) at the wafer insertion side end. First protrusions (5) of one sidewall member (1) and the other sidewall member (2) of the pair of sidewall members (1, 2) are provided at identical positions opposing each other. Similarly, second protrusions (6) of one sidewall member (1) and the other sidewall member (2) are provided at identical positions opposing each other. COPYRIGHT: (C)2006,JPO&NCIPI |
