METHOD OF MANUFACTURING CERAMIC MULTILAYER SUBSTRATE AND CERAMIC MULTILAYER SUBSTRATE AND POWER AMPLIFIER MODULE USING IT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic multilayer substrate with high heat conductivity for executing calcination by improving the sinterability of ceramics while suppressing the evaporation of an electrode whose main component is Ag, and the ceramic multilayer substrate and a power amplifier module using it. SOLUTION: In the method of manufacturing the ceramic multilayer substrate constituted of a ceramic composition using aluminum oxide or magnesium oxide as the main component of the ceramic composition and including copper oxide and niobium oxide as sub components and the electrode (wiring electrode 103 for instance) whose main component is silver, the method is composed of a baking process of executing the baking of the first stage in the atmosphere and the baking of the second stage in the atmosphere where an oxygen content is≤10 vol.%. COPYRIGHT: (C)2006,JPO&NCIPI