| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an optical apparatus having a fluctuation detecting device, by which mutual interference is prevented even in the use of a drive frequency to which the drive frequencies of a plurality of sensors are close and the manufacture is facilitated while positional relations between the sensors are correctly maintained. SOLUTION: The manufacturing method for the optical apparatus 200 having the fluctuation detecting device including the plurality of the fluctuation detecting sensors 320 which have almost the same drive frequency comprises: a substrate formation process in which a sensor hold substrate 310 is formed so as to have sensor fixing parts 310a and 310b and a substrate separating part 310c including cuttable parts 310d and 310e disposed between the sensor fixing parts 310a and 310b; a sensor fixing process in which the plurality of fluctuation detecting sensors 320 are fixed to the sensor hold substrate 310 while the predetermined positional relations are maintained; a sensor hold substrate fixing process in which the sensor hold substrate 310 is fixed to a fixing member 210; and a separation process in which the cuttable parts 310d and 310e are cut to separate the sensor fixing parts 310a and 310b. COPYRIGHT: (C)2006,JPO&NCIPI |
