发明名称 METHOD FOR MAKING ESTIMATION PATTERN AND COMPUTER-READABLE RECORDING MEDIUM RECORDED WITH COMPUTER PROGRAM
摘要 An evaluation pattern generating method includes generating plural types of unit patterns based on a seed pattern group and a unit frame, the seed pattern group including plural types of seed patterns, each of the plural types of unit patterns including a pattern that corresponds to the seed pattern arranged in the unit frame, and generating plural types of evaluation patterns based on the plural types of unit patterns and an arrangement frame having a size that is N times of the unit frame (N is a positive integer), each of the plural types of evaluation patterns including the plural types of evaluation unit patterns arranged in the arrangement frame so that the inside of the arrangement frame is filled with the plural types of the unit patterns.
申请公布号 KR100770815(B1) 申请公布日期 2007.10.26
申请号 KR20060051279 申请日期 2006.06.08
申请人 发明人
分类号 H01L21/66;G03F1/36;G03F1/68;G03F1/70;G06F9/44;G06F17/50;H01L21/027 主分类号 H01L21/66
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