| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying apparatus which is small-sized and does not contaminate the apparatus environment. SOLUTION: In a conveying apparatus 1, 2, a dead point bail-out mechanism 50 is simply structured and made thin. Furthermore, since a connecting portion of a hand part 20 can be thinned, an opening of a gate valve into which the hand part 20 is inserted, can be reduced in size. As a result, dust within a conveying chamber hardly enters a processing chamber. Since first and second rotary shafts 11, 12 are concentrically disposed, the area to install the apparatus is reduced and moreover, since a turning radius is small, the conveying chamber wherein the conveying apparatus 1, 2 is disposed can be reduced. COPYRIGHT: (C)2009,JPO&INPIT
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