| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor chip capable of preventing characteristics failures of cicuit elements by protecting the circuit elements from electro static charge by static electricity or the like and being inexpensively manufactured. SOLUTION: The sensor chip 100 is formed by forming a sensor element 31 and a control circuit 32 for the sensor element 31 in the same semiconductor substrate 10. The control circuit 32 includes a plurality of circuit elements 32a and 32b, each of which is isolated by PN junction isolation in the semiconductor substrate 10. Conductive films 21 and 22 are formed on at least one circuit element of the plurality of circuit elements 32a and 32b to surrounding the circuit element and the conductive films 21 and 22 are fixed at predetermined electric potentials V1 and V2. COPYRIGHT: (C)2009,JPO&INPIT
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