摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a multilayer electronic component which is capable of improving the dimensional accuracy of an electrode pattern. SOLUTION: The ceramic green sheet 21 is formed on a PET (poly ethylene terephthalate) film 23. Subsequently, a recess is formed on the ceramic green sheet 21 by pushing a stamper 27, on which a projection corresponding to the electronic pattern is formed, against the ceramic green sheet 21 in a recess forming process. The formed recess is filled with electrode paste, thereby the electrode pattern is formed on the ceramic green sheet 21. Thereafter, the electrode pattern is dried in a drying process. In the recess forming process, the recess is formed on the ceramic green sheet 21 and a first region, on which the recess is formed, is heated. Temperature in a second region, contacted with the first region in the PET film 23, is controlled so that a temperature in the recess forming process becomes higher than that in the drying process. COPYRIGHT: (C)2009,JPO&INPIT
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