FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a film-forming method which makes a film adequately cover a step, stably supplies a raw material, and can practically and inexpensively form a high-quality metal film without deteriorating the raw material, and to provide a film-forming apparatus therefor. SOLUTION: The film-forming method comprises the steps of: making a metal salt of a divalent carboxylic acid react with a carboxylic acid to produce a gas of a metal salt of a monovalent carboxylic acid; supplying the gas of the metal salt of the monovalent carboxylic acid onto a substrate 1 to make a film 2 of the metal salt of the monovalent carboxylic acid deposit thereon; and decomposing the film 2 of the metal salt of the monovalent carboxylic acid by giving an energy to the substrate 1 having the film 2 of the metal salt of the monovalent carboxylic acid deposited thereon to form a metal film 3. COPYRIGHT: (C)2009,JPO&INPIT