| 摘要 |
PROBLEM TO BE SOLVED: To provide an easy and highly efficient manufacturing method of a tip type probe. SOLUTION: The manufacturing method of the tip type probe, having a metal film on the side surface of a truncated cone, constituted of a top surface and the side surface includes: a process for forming an etching mask, having a shape similar to the top surface on a substrate; a process for forming the truncated cone by the isotropic etching of the substrate using the etching mask as a mask material; a process for stopping the isotropic etching after the area of the top surface becomes smaller than the area of the etching mask; and a process for forming the metal film, by turning the film forming particles into the gap between the etching mask and the side surface. COPYRIGHT: (C)2009,JPO&INPIT |
