| 摘要 |
PROBLEM TO BE SOLVED: To suppress variation in height of the surface of a substrate by making distortion of a table mounted with the substrate small by effectively cooling the table when the substrate having temperature above room temperature is supported. SOLUTION: A substrate supporting device includes a table (100, 500) mounted with the substrate having a temperature above room temperature on its top surface, a cooling means (112, 122) provided on the reverse surface of the table, a plurality of holes (101, 102) provided along the thickness of the table, and a plurality of heat conducting means composed of a substance having higher heat conductivity than the substance constituting the table and provided in the plurality of holes to conduct heat of the table to the cooling means. Heat conductivity of the table in the thickness direction is improved and then part of the table near the top surface is effectively cooled to make distortion near the top surface of the table small. COPYRIGHT: (C)2009,JPO&INPIT |
