| 摘要 |
A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Channel blocks on a lower stage include a plural-line (three-line) passage block 21 disposed over a plurality of lines. The plural-line passage block 21 receives an upper stage over three lines, with each of the lines including an inlet extension 16b of a flow rate controller 16, and two inlet-side on-off valves 14, 15 arranged in series with the inlet extension 16b. The plural-line passage block 21 has longitudinal passages and transverse passages therein. The longitudinal passages are in communication with passages of the fluid control devices arranged in series per line. The transverse passages are in communication with passages of fluid control devices arranged in adjacent lines. |
